| 摘要 |
<p>The amount of gas released from components constituting an orbitron pump is reduced. This orbitron pump has disposed in the inside of a chamber (4) thereof an anode (1), and absorbent material source (2), and a filament (3) for electron discharge. The anode (1) is made such that electrical heating can be carried out. Thus, the anode can be electrically cheated before an opening operation, degasification can be carried out, and the amount of gas released during pump operation can be reduced.</p> |
