METHOD FOR MANUFACTURING NANO-STRUCTURED SEMICONDUCTOR LIGHT-EMITTING ELEMENT

摘要

Provided is a method for manufacturing a nano-structured semiconductor light-emitting element, the method according to one aspect of the present invention comprising the steps of: forming, on a base layer, a mask having a plurality of openings; forming a plurality of nano-cores by growing first conductive semiconductors in the exposed areas of the base layer so as to fill the plurality of the openings thereon; removing the mask partially so that the sides of the plurality of nano-cores are exposed; heat-treating the plurality of nano-cores after the mask is partially removed; after the heat treatment, forming a plurality of nano light-emitting structures by growing, sequentially, an activation layer and a second conductive semiconductor layer on the surface of the plurality of nano-cores; and leveling the upper ends of the plurality of nano light-emitting structures so that the upper surfaces of the nano-cores are exposed.