METHOD AND DEVICE FOR HIGH THROUGHPUT CRYSTAL STRUCTURE ANALYSIS BY ELECTRON DIFFRACTION

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for crystal structure analysis by electron diffraction.SOLUTION: A method and a device for electron diffraction tomography of a crystal sample comprises the steps of: acquiring a series of electron diffraction patterns, in combination with a beam scanning protocol so that a beam converges at every discrete location 42 and 43 of a sample 38, by using scanning of the electron beam over a plurality of discrete locations of the sample; and acquiring a common intensity scaling factor, by using template matching to determine crystal orientations and thickness maps.