发明名称
摘要 A transferring apparatus 1 includes a revolving base 13, two hand mechanisms 13 and 14, and two hand drive mechanisms 30 and 40. The hand mechanisms 13 and 14 are provided at a revolving base 13 so as to be rotatable about rotation axes L2 and L3, respectively. The hand mechanisms 13 and 14 are configured to be individually rotatable by hand drive mechanisms 30 and 40, respectively. Each of the hand mechanisms 13 and 14 includes an arm 20, a hand 21, and an interlock mechanism 26. The arms 21 are provided at the revolving link so as to be rotatable about the rotation axes L2 and L3, respectively. The hands 20 are respectively provided at the arms 21 so as to be rotatable about the hand axes L4 and L5, respectively. The interlock mechanism 26 is configured such that a reduction ratio of the hand 21 to the arm 20 is 1.55, and the arm 20 and the hand 21 operate in conjunction with each other.
申请公布号 JP5568328(B2) 申请公布日期 2014.08.06
申请号 JP20100025836 申请日期 2010.02.08
申请人 发明人
分类号 B25J9/06;H01L21/677 主分类号 B25J9/06
代理机构 代理人
主权项
地址
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