| 摘要 |
PURPOSE: A liquid treatment method and a device of removing gas in a filter remove the gas in the filter by supplying a liquid having higher pressure than the pressure when a medicinal fluid flows in a liquid treatment process of a substrate to the filter. CONSTITUTION: A liquid is supplied to a filter unit (4) with higher pressure than the pressure when a medicinal fluid flows in a liquid treatment process. The filter unit has a filter for removing impurities in the medicinal fluid. Gas included in the filter by the liquid pressure of the liquid is dissolved in the medicinal fluid because the pressure applied to the liquid in the filter is increased. The medicinal fluid is supplied to an application nozzle (85) through the filter. [Reference numerals] (1) Undercurrent unit; (3) Medium tank; (4) Filter unit; (5) Pump; (6) Degassing module; (7) Gas concentration detection unit |
