Reverse conductive nano array and manufacturing method of the same

摘要

A high-speed photodiode may include a photodiode structure having a substrate, a light-absorbing layer and a light-directing layer that is deposited on a top surface of the photodiode structure and patterned to form a textured surface used to change the angle of incident light to increase a light path of the incident light when entering the photodiode structure. In one embodiment, the light-directing layer may include a plurality of polygon such as triangular projections to refract the incident light to increase the light path thereof when entering the photodiode structure. In another embodiment, a plurality of nanoscaled sub-triangular projections can patterned on both sides of each triangular projection to more effectively increase the light paths. In a further embodiment, porous materials can be used to form the light-directing layer.

主权项

1. A photodiode comprising:
a diode structure including a substrate, and a light-absorbing layer; and a light-directing layer including a plurality of polygon projections that is deposited on a top surface of the diode structure and patterned to form a textured surface used to change the angle of incident light to increase a light path of the incident light when entering the diode structure, wherein the polygon projections include a plurality of triangular and sub-triangular projections, and said sub-triangular projections are patterned on both sides of each triangular projection.