发明名称 Memory device
摘要 A phase-change memory device includes a first insulator having a hole therethrough, a first electrode that conforms at least partially to the hole, a phase-change material in electrical communication with the first electrode, and a second electrode in electrical communication with the phase-change material. When current is passed from the first electrode to the second electrode through the phase-change material, at least one of the first and second electrodes remains unreactive with the phase change material.
申请公布号 US8796101(B2) 申请公布日期 2014.08.05
申请号 US201213590085 申请日期 2012.08.20
申请人 Ovonyx, Inc. 发明人 Czubatyj Wolodymyr;Sandoval Regino
分类号 H01L21/8239 主分类号 H01L21/8239
代理机构 代理人 Bray Kevin L.
主权项 1. A method of making a memory device comprising: providing a first insulator; configuring a hole through said first insulator; providing a first conductive layer that conforms to the inner periphery of said hole; configuring a portion of said first conductive layer to provide a first electrode, said first electrode being conformal to said periphery of said hole; providing a phase-change material over said first insulator and in electrical communication with said first electrode, said phase-change material having a lower surface, said lower surface including a radially-inwardly facing surface portion and an arcuate-shaped, downwardly-facing portion; providing a second insulator over said phase-change material and said hole; removing a portion of said second insulator to expose a portion of said phase-change material, said exposed portion of said phase-change material being laterally displaced from said inner periphery of said hole; and providing a second conductive layer over said exposed portion of said phase-change material, said second conductive layer being in electrical communication with said phase-change layer.
地址 Sterling Heights MI US