Integrated inertial sensing apparatus using MEMS and quartz configured on crystallographic planes

摘要

An apparatus for inertial sensing. The apparatus includes a substrate member comprising a thickness of silicon. The apparatus also has a first surface region configured from a first crystallographic plane of the substrate and a second plane region configured from a second crystallographic plane of the substrate. The apparatus has a quartz inertial sensing device coupled to the first surface region, and one or more MEMS inertial sensing devices coupled to the second plane region.

主权项

1. An apparatus for inertial sensing, the apparatus comprising:
a substrate member comprising a thickness of material and a surface region; a first surface region configured from a first crystallographic plane of the substrate member; a second plane region configured from a second crystallographic plane of the substrate member, wherein the first crystallographic plane and the second crystallographic plane form an acute angle; a quartz inertial sensing device coupled to the first surface region; one or more MEMS inertial sensing devices coupled to the second plane region; an enclosure housing the one or more MEMS inertial sensing devices and the quartz inertial sensing device and configured overlying a first outer region of the surface region, the enclosure housing have an upper cover region; and one or more bonding structures, each of the bonding structures having a bonding pad within a vicinity of the upper cover region and provided within a second outer region of the surface region, wherein the second outer region is characterized by a width of about 100 microns and less, and wherein the first outer region is characterized by a width of about 200 microns and less.