Apparatus for fabricating and optically detecting biochip

摘要

An apparatus for fabricating a biochip is provided. The apparatus includes a reaction chamber which encapsulates the biochip to be sealed form an external environment. The apparatus further includes an exposure system which has a light source and a spatial light modulator. The spatial light modulator receives light from the light source and forms an optical image utilizing the light. The optical image is received by the biochip. The apparatus further includes a detection system which detects light proceeding form the biochip.

主权项

1. An apparatus for fabricating a biochip, the apparatus comprising:
a reaction chamber which encapsulates the biochip to be sealed from an external environment; an exposure system which has a light source and a spatial light modulator, the spatial light modulator receives light from the light source and forms an optical image utilizing the received light, the optical image being received by the biochip; a detection system which detects light proceeding from the biochip; an optical path changing unit comprising
a polarizing beam splitter which is disposed between the light source and the spatial light modulator;a polarizer which is disposed between the light source and the polarizing beam splitter; anda quarter-wavelength plate which is disposed between the polarizing beam splitter and the spatial light modulator; and a distortion correction device disposed between the polarizing beam splitter and the reaction chamber, wherein the distortion correction device comprises a deformable mirror having a reflective surface which is deformable in response to at least one of mechanical and electrical manipulation for correcting distortion of the optical image.