发明名称 Repair method for optical elements having a coating and corresponding optical elements
摘要 A method for repairing optical elements having a coating, in which the coating is fully or partially removed or left on the optical element, a polishing layer being provided in the coating or a polishing layer being applied, which allows simple processing of the surface to achieve high geometrical accuracy and lower surface roughness. A new coating is applied onto the corresponding polishing layer. Also addressed are corresponding optical elements, including optical elements recycled according to the method.
申请公布号 US8795839(B2) 申请公布日期 2014.08.05
申请号 US200912350474 申请日期 2009.01.08
申请人 Carl Zeiss SMT GmbH 发明人 Boehm Thure
分类号 G02B1/10;B05D3/00;B05D3/06;B05D3/14;B05D5/06;B32B17/00;G02B1/02 主分类号 G02B1/10
代理机构 Edell, Shapiro & Finnan, LLC 代理人 Edell, Shapiro & Finnan, LLC
主权项 1. Optical element having a substrate and a coating, the coating comprising a functional coating and a cleaving layer, wherein the cleaving layer is a polishing layer processed more geometrically accurately and with lower surface roughness than the substrate.
地址 Oberkochen DE