发明名称 |
Repair method for optical elements having a coating and corresponding optical elements |
摘要 |
A method for repairing optical elements having a coating, in which the coating is fully or partially removed or left on the optical element, a polishing layer being provided in the coating or a polishing layer being applied, which allows simple processing of the surface to achieve high geometrical accuracy and lower surface roughness. A new coating is applied onto the corresponding polishing layer. Also addressed are corresponding optical elements, including optical elements recycled according to the method. |
申请公布号 |
US8795839(B2) |
申请公布日期 |
2014.08.05 |
申请号 |
US200912350474 |
申请日期 |
2009.01.08 |
申请人 |
Carl Zeiss SMT GmbH |
发明人 |
Boehm Thure |
分类号 |
G02B1/10;B05D3/00;B05D3/06;B05D3/14;B05D5/06;B32B17/00;G02B1/02 |
主分类号 |
G02B1/10 |
代理机构 |
Edell, Shapiro & Finnan, LLC |
代理人 |
Edell, Shapiro & Finnan, LLC |
主权项 |
1. Optical element having a substrate and a coating, the coating comprising a functional coating and a cleaving layer, wherein
the cleaving layer is a polishing layer processed more geometrically accurately and with lower surface roughness than the substrate. |
地址 |
Oberkochen DE |