MEMS switch with reduced dielectric charging effect

摘要

The present disclosure provides in one embodiment, a semiconductor device that includes a MEMS switch having a substrate, a first dielectric layer disposed above the substrate, and a bottom signal electrode, a bump, and a bottom actuation electrode disposed above the first dielectric layer. The MEMS switch further includes a second dielectric layer enclosing the bottom signal electrode, and a movable member including a top signal electrode disposed above the bottom signal electrode and a top actuation electrode disposed above the bottom actuation electrode and the bump, wherein the top actuation electrode is electrically coupled to the bump. A method of fabricating a MEMS switch is also disclosed.

主权项

1. A micro-electro-mechanical systems (MEMS) switch, comprising:
a substrate; a first dielectric layer disposed above the substrate; a bottom signal electrode, a bump, and a bottom actuation electrode disposed above the first dielectric layer; a second dielectric layer enclosing the bottom signal electrode; and a movable member including a top signal electrode disposed above the bottom signal electrode and a top actuation electrode disposed above the bottom actuation electrode and the bump, wherein the top actuation electrode is electrically coupled to the bump, and at least one support member that comprises the first dielectric layer and is directly below the top actuation electrode.