STAGE TRANSFERRING DEVICE AND POSITION MEASURING METHOD OF STAGE

摘要

The present invention relates to a stage transferring device and a stage position measuring method using the same and, more specifically, to a stage transferring device including a stage position measuring device and a stage position measuring method using the same. The stage transferring device according to an embodiment of the present invention comprises a transferring stage capable of mounting, supporting and transferring a work target object; and the stage position measuring device. The stage position measuring device includes: at least one 1D scale positioned on the transferring stage; at least one 1D scale reading head overlapping with the 1D scale, projecting a measurement beam onto the 1D scale to measure a y-axis coordinate of the transferring stage; at least one 2D encoder positioned on the transferring stage; and at least one 2D encoder reading head capable of overlapping with the 2D encoder according to the movement of the transferring stage and projecting the measurement beam onto the 2D encoder to measure an x-axis and a y-axis coordinate which are two-dimensional coordinates on an xy-plane of the transferring stage.