摘要 |
<p>Embodiments relate to a plasma reactor including two or more sub-plasma reactors connected in series to generate an increased amount or increase the reactivity of radicals and reactive species. The two sub-plasma reactors may be of the same type or a different type. The plasma reactor including two or more sub-plasma reactors connected in series is advantageous, among other reasons, because smaller space is used compared to having multiple plasma reactors placed on tandem.</p> |