发明名称 CASCADED PLASMA REACTOR
摘要 <p>Embodiments relate to a plasma reactor including two or more sub-plasma reactors connected in series to generate an increased amount or increase the reactivity of radicals and reactive species. The two sub-plasma reactors may be of the same type or a different type. The plasma reactor including two or more sub-plasma reactors connected in series is advantageous, among other reasons, because smaller space is used compared to having multiple plasma reactors placed on tandem.</p>
申请公布号 WO2014116520(A1) 申请公布日期 2014.07.31
申请号 WO2014US12076 申请日期 2014.01.17
申请人 VEECO ALD INC. 发明人 LEE, SANG, IN
分类号 C23C16/50 主分类号 C23C16/50
代理机构 代理人
主权项
地址