| 摘要 |
Provided is a multilayer hard film capable of elongating a lifetime of a member. A multilayer hard film (1) is formed by alternately stacking a layer A (11) made of Ti 1-x Si x (B p C q N r ) [where 0.05 ‰¦ x ‰¦ 0.4, p ‰§ 0, q ‰§ 0, r > 0, p + q+ r = 1], and a layer B (12) made of at least one selected from the group of Ti 1-a-g-b B a C g N b [where 0.05 ‰¦ a ‰¦ 0.5, 0.25 ‰¦ b ‰¦ 0.6, 0 ‰¦ g ‰¦ 0.5], Si 1-c-d C c N d [where 0.2 ‰¦ c ‰¦ 0.5, 0.25 ‰¦ d ‰¦ 0.5], B 1-e-f C e N f [where 0.03 ‰¦ e ‰¦ 0.25, 0.3 ‰¦ f ‰¦ 0.55], TiB 2 , SiC and B 4 C, one another over the surface of the substrate (2). |
