Acoustic wave resonator having a gasket

摘要

In one aspect of the invention, an acoustic wave device includes a substrate, an acoustic isolator formed in or on the substrate, a bottom electrode formed on the acoustic isolator, a piezoelectric layer formed on the bottom electrode, a top electrode formed on the piezoelectric layer, and boundary means such as a gasket surrounding one of the first and second electrodes whose perimeter is aligned inside the perimeter of the acoustic isolator. The gasket has a lateral side having a wall profile, a curve profile, a multi-step profile, a gradually variable profile, or a combination of them.

主权项

1. An acoustic wave resonator, comprising:
(a) a substrate; (b) an acoustic isolator formed in or on the substrate, having a perimeter defining a first edge and an opposite, second edge; (c) a first electrode formed on the acoustic isolator; (d) a piezoelectric layer formed on the first electrode; (e) a second electrode formed on the piezoelectric layer, having a perimeter defining a first edge and an opposite, second edge, wherein the perimeter of the second electrode is aligned inside the perimeter of the acoustic isolator; and (f) a gasket formed on the piezoelectric layer such that the gasket surrounds the perimeter of the second electrode and is aligned inside the perimeter of the acoustic isolator, wherein the gasket is formed of a metal material, and wherein a gap defined by a distance between the gasket and the perimeter of the second electrode is filled with a non-conductive material.