Method of manufacturing wiring substrate

摘要

There is provided a method of manufacturing a wiring substrate. The method includes: (a) forming a first resist layer having first openings therein on a first surface of a support plate, forming first plated films in the first openings by an electrolytic plating method, and removing the first resist layer; (b) forming a second resist layer having second openings therein on the first surface of the support plate, forming second plated films in the second openings by an electrolytic plating method, and removing the second resist layer; (c) forming a wiring layer and an insulating layer such that the wiring layer is electrically connected to the first and second plated films; and (d) removing the support plate to expose the first and second plated films.

主权项

1. A method of manufacturing a wiring substrate, the method comprising:
(a) forming a first resist layer having first openings therein on a first surface of a support plate, forming first plated films in the first openings by an electrolytic plating method, and removing the first resist layer; (b) after (a), forming a second resist layer having a second opening therein on the first surface of the support plate while covering the first plated films, wherein the second opening is formed in a frame shape to surround the first openings when viewed from a top and the second opening is formed to expose only the first surface of the support plate therethrough, and forming a second plated film in the second opening by an electrolytic plating method such that the second plated film is formed in a frame shape to surround the first plated film when viewed from the top, and removing the second resist layer; (c) forming an insulating layer on the first surface of the support plate so as to cover the first plated films and the second plated film, and forming a wiring layer on the insulating layer such that the wiring layer is electrically connected to the first plated films and second plated film; and (d) removing the support plate to expose the first plated films and second plated film, so that the first plated films serve as first electrode pads and the second plated films serve as second electrode pads,wherein a material of the first plated films is different from that of the second plated films.