CALIBRATION STANDARD MEMBER AND MANUFACTURING METHOD THEREFOR AND CALIBRATION METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a calibration standard member which allows for high accuracy astigmatism adjustment used in a charged particle beam device.SOLUTION: A calibration standard member 16 for calibrating the aberration of a charged particle beam device in which a charged particle beam scans on the surface of a sample by deflection has, as a calibration pattern 3 for calibrating the aberration of a charged particle beam, a plurality of patterns composed of a silicon layer 11 extending in one direction and a molybdenum layer 12 in the same plane, and a part of the pattern is curved.