| 摘要 |
PROBLEM TO BE SOLVED: To provide a reliable displacement detection device capable of preventing brittle fracture of a base material of a beam even if stress is concentrated to a root of the beam by a load acting on a mass body, and to provide a method of manufacturing the displacement detection device.SOLUTION: An acceleration switch includes: a substrate part 4; a mass body 2 displaced by an external force; a beam 3 whose one end is connected to the mass body 2 and the other end is connected to the substrate part 4 and that displaceably supports the mass body 2; and a central electrode 5 for detecting displacement of the mass body 2. In the plane view, the line 206 interconnecting both ends of the root at the other end of the beam 3 is not parallel with crystal orientations <010> and <001> of a base material constituting the beam 3. |
