发明名称 ELECTROSTATIC ACTUATOR AND MANUFACTURING METHOD THEREOF
摘要 <p>The present invention relates to electrostatic actuator and manufacturing method thereof, wherein the electrostatic actuator comprising: an elastic ribbon; and a plurality of electrode plate pairs, each electrode plate pair of which sandwiches the elastic ribbon, wherein the plurality of electrode plate pairs is piled up into a multi-layer structure through folding of the elastic ribbon. Compared to the prior art, the electrostatic actuator can be manufactured easily.</p>
申请公布号 WO2014110798(A1) 申请公布日期 2014.07.24
申请号 WO2013CN70701 申请日期 2013.01.18
申请人 SIEMENS AKTIENGESELLSCHAFT;LAI, SHENG;LI, MING 发明人 LAI, SHENG;LI, MING
分类号 H02N13/00;H02N1/00 主分类号 H02N13/00
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