摘要 |
<p>The present invention relates to electrostatic actuator and manufacturing method thereof, wherein the electrostatic actuator comprising: an elastic ribbon; and a plurality of electrode plate pairs, each electrode plate pair of which sandwiches the elastic ribbon, wherein the plurality of electrode plate pairs is piled up into a multi-layer structure through folding of the elastic ribbon. Compared to the prior art, the electrostatic actuator can be manufactured easily.</p> |