| 发明名称 |
MICRO-ELECTRO MECHANICAL SYSTEM (MEMS) STRUCTURES AND METHODS OF FORMING THE SAME |
| 摘要 |
A device includes a first substrate bonded with a second substrate structure. The second substrate structure includes an outgasing prevention structure. At least one micro-electro mechanical system (MEMS) device is disposed over the outgasing prevention structure. |
| 申请公布号 |
US2014203421(A1) |
申请公布日期 |
2014.07.24 |
| 申请号 |
US201414253224 |
申请日期 |
2014.04.15 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
SHU Chia-Pao;HUNG Chia-Ming;TAI Wen-Chuan;WANG Hung-Sen;CHEN Hsiang-Fu;KALNITSKY Alex |
| 分类号 |
B81B7/00;B81C1/00 |
主分类号 |
B81B7/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A device comprising:
a first substrate; and a second substrate structure bonded to the first substrate, the second substrate structure comprising:
an outgasing prevention structure; andat least one micro-electro mechanical system (MEMS) device disposed over the outgasing prevention structure. |
| 地址 |
Hsinchu TW |
