发明名称 SHAPE MEASURING DEVICE, AND STRUCTURE MANUFACTURING SYSTEM AND METHOD
摘要 PROBLEM TO BE SOLVED: To provide a shape measuring device which can suppress the deterioration in measurement accuracy.SOLUTION: A shape measuring device which measures a shape of a surface Ma of a hole includes: a shape acquisition part 5 including an image sensor 18 which applies light to the surface of the hole so as to detect the light reflected by the surface of the hole; a calculator calculating the shape of the surface of the hole by using a signal detected by the shape acquisition part; and a contact detector 40 arranged in a manner to be inserted into an optical path of the shape acquisition part in accordance with the contact with the surface of the hole.
申请公布号 JP2014134437(A) 申请公布日期 2014.07.24
申请号 JP20130002081 申请日期 2013.01.09
申请人 NIKON CORP 发明人 TAKESHITA KOKI
分类号 G01B11/24 主分类号 G01B11/24
代理机构 代理人
主权项
地址