SENSOR ELEMENT, PRESSURE-SENSITIVE SENSOR, AND TACTILE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a sensor element, a pressure-sensitive sensor, and a tactile sensor that are capable of detecting information such as pressure and frictional force with high sensitivity.SOLUTION: A sensor element comprises: a frame 12 having an aperture 19; a thin film 14 that is elastically deformable provided in such a manner as to cover the aperture 19; and a cantilever 16, the base end of which is held by the frame 12, which is elastically deformable and integrated with the thin film 14.