GLASS SUBSTRATE WITH LAMINATED FILM AND MANUFACTURING METHOD THEREFOR

摘要

A glass substrate with a laminated film, wherein the laminated film is formed on a glass ribbon by the CVD method with multiple injectors provided in an annealing furnace. When the glass transition temperature is Tg and the glass strain temperature is Ts, the laminated film is formed at Tg+50°C or less, and at least two or more layers of the laminated film are formed in a temperature range of from Tg+50°C to Ts. Further, the drop temperature K1 per unit length of the glass ribbon in a temperature range in which all layers of the laminated film are formed is 0°C/m