| 摘要 |
<p>A layered structure has a primary hard layer comprising silicon-containing composition. A layered structure has a primary hard layer comprising silicon-containing composition ((M oSi pAY' q)(gamma )(N rC sO t)(delta ), where M is aluminum and element chosen from II group, IVB group, VB group and VIB group of periodic table, AY' is manganese, iron, cobalt, nickel, boron, copper, IIIB group element, and element chosen from IA group, IIA group and IIIA group of periodic table, and element of lanthanoid series, (gamma ) is 40-60 and (gamma +delta ) is 100). Independent claims are included for the following: (1) arc deposition source; and (2) merging deposition source.</p> |
