| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck capable of uniformly heating or cooling an attraction object attracted to an attracting surface by uniforming the temperature distribution of the attracting surface. SOLUTION: The electrostatic chuck 1 includes a ceramic insulating plate 10 and a metal base 30, and attracts the attraction object 2 to the attracting surface 11 using electrostatic attracting force generated when voltage is applied to an attracting electrode layer 51. The ceramic insulating plate 10 includes thereinside a heater electrode layer 61 and a cooling gas passage 41. The cooling gas passage 41 includes a horizontal hole 42 extending in the planar direction of the ceramic insulating plate 10. The attracting electrode layer 51 is disposed closed to the attracting surface 11 than to the horizontal hole 42 within the ceramic insulating plate 10, and the heater electrode layer 61 is disposed closer to a joining surface 12 side than to the horizontal hole 42 within the ceramic insulating plate 10. COPYRIGHT: (C)2011,JPO&INPIT |
