发明名称 |
Method of manufacturing a poly-crystalline silicon layer, method of manufacturing an organic light-emitting display apparatus including the same, and organic light-emitting display apparatus manufactured by using the same |
摘要 |
<p>A method of manufacturing a polysilicon (poly-Si) layer, a method of manufacturing an organic light-emitting display apparatus using the method, and an organic light-emitting display apparatus manufactured by using the method. The method includes forming an amorphous silicon (a-Si) layer on a substrate having first and second areas, thermally treating the a-Si layer to partially crystallize the a-Si layer into a partially crystallized Si layer, removing a thermal oxide layer through a thermal treatment, selectively irradiating the first areas with laser beams to crystallize the partially crystallized Si layer.</p> |
申请公布号 |
EP2741314(A3) |
申请公布日期 |
2014.07.23 |
申请号 |
EP20130171624 |
申请日期 |
2013.06.12 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
MOON, SANG-HO;HUH, JONG-MOO;KIM, SUNG-HO |
分类号 |
H01L21/20;H01L27/32;H01L29/786 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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