发明名称 |
SONOS memory device |
摘要 |
A bandgap engineered SONOS device structure for design with various AND architectures to perform a source side injection programming method. The BE-SONOS device structure (100) comprises a spacer oxide (O s ) disposed between a control gate (110) overlaying an oxide-nitride-oxide-nitride-oxide stack and a sub-gate (130) overlaying a gate oxide. In a first embodiment, a BE-SONOS sub-gate-AND array architecture is constructed multiple columns of SONONOS devices with sub-gate lines and diffusion bitlines. In a second embodiment, a BE-SONOS sub-gate-inversion-bitline-AND architecture is constructed multiple columns of SONONOS devices with sub-gate inversion bitlines and with no diffusion bitlines. |
申请公布号 |
EP1860687(B1) |
申请公布日期 |
2014.07.23 |
申请号 |
EP20070252039 |
申请日期 |
2007.05.18 |
申请人 |
MACRONIX INTERNATIONAL CO., LTD. |
发明人 |
LUE, HANG-TING;LIEN, HAO-MING |
分类号 |
H01L27/115;G11C16/04;H01L29/792 |
主分类号 |
H01L27/115 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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