Stage

摘要

Provided is a substrate stage which can transfer a substrate at a high speed. In the substrate stage of the present invention, auxiliary mounting tables are attached to a main mounting table, and lower rails are arranged over on the main mounting table and above the auxiliary mounting tables. When both ends of the lower rails are bent upwardly by a vertically adjusting unit in order to prevent the both ends of the lower rails to be bent downwardly, the lower rails are made straight. Since the lower rail is not divided, the linearity is ensured and the moving plate does not stutter so that transfer of the substrate at high speed can be performed.

主权项

1. A stage, comprising:
a main mounting table; an auxiliary mounting table which has an area smaller than an area of the main mounting table and can be separated from the main mounting table; a plurality of lower rails which are arranged over on the main mounting table and above the auxiliary mounting table, end portions of the lower rail being positioned above the auxiliary mounting table; and a moving plate which is located above each of the lower rails and can be run above the lower rails, wherein each one of the plurality of lower rails is formed from a single raw plate, the lower rails being detachably attached to the main mounting table and the auxiliary mounting table, and wherein the auxiliary mounting tables are provided with a vertically adjusting unit which can adjust the height of the lower rails at plural positions, wherein one side of each auxiliary mounting table is fixed to the main mounting table and a portion of the auxiliary mounting table, which is fixed to the main mounting table, is supported by the main mounting table, and a portion of the auxiliary mounting table opposed to the portion of the auxiliary mounting table, which is fixed to the main mounting table, is unsupported by the main mounting table.