| 摘要 |
A repellent resist composition is provided to impart sufficient repellency to a repellent portion, to be highly alkali-soluble, to prevent a fluorinated polymer from dissolving into a lyophilic portion upon developing, and to exhibit high solubility of the fluorinated polymer in a resist solvent. A repellent resist composition contains (A) a fluorinated polymer and has a concentration of fluorine in the fluorinated polymer of 15-35wt%, an acid value of 40-200 mgKOH/g, and a weight average molecular weight of 3,000-20,000. The fluorinated polymer has, as repeating units, (a1) 100 parts by weight of alpha-substituted acrylate having a C4-6 fluoroalkyl group, wherein a substituent in the alpha position is a fluorine atom, chlorine atom, bromine atom, iodine atom, CFX^1X^2 group(wherein, X^1 and X^2 are a hydrogen atom, fluorine atom, or chlorine atom), cyano group, C1-20 linear or branched fluoroalkyl group, substituted or unsubstituted benzyl group, substituted or unsubstituted phenyl group, or C1-20 linear or branched alkyl group, (a2) 5-45 parts by weight of an unsaturated organic acid, and (a3) 5-120 parts by weight of a monomer having a high softening point. |
