| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for growing carbon nanotubes which is free from aggregation of metal particles serving as a catalyst, and a method of manufacturing the same.SOLUTION: A substrate 1 for growing carbon nanotubes comprises a substrate 2, a noble metal alloy catalyst 3 composed of an alloy of a noble metal and a transition metal, and a form-defining material layer 4 in which the noble metal alloy catalyst 3 is dispersedly arranged. A method of manufacturing the substrate 1 for growing carbon nanotubes comprises the steps of: sputtering a noble metal alloy onto the substrate 2; sputtering a form-defining material onto the substrate 2; and further sputtering the noble metal alloy onto the form-defining material. |
