发明名称 STORAGE DEVICE FOR STORING AND/OR FOR TRANSPORTING OBJECTS FROM THE SITE OF PRODUCTION OF ELECTRONIC COMPONENTS
摘要 The invention relates to a device which is intended for storing and/or for transporting objects from the site of production of electronic components outside a process facility and which has a multiplicity of mounts for storing the object and is provided with means for introducing nitrogen or some other inert gas into the device, in order for the objects to be flushed with nitrogen. In order for it to be possible, in the case of such a device, to achieve improvement in respect of avoiding contamination of the objects from the region of production of electrical components, means are proposed for the purpose of heating the nitrogen, or the inert gas, to a temperature of at least 30°C or more in the region of the objects.
申请公布号 WO2014107818(A2) 申请公布日期 2014.07.17
申请号 WO2014CH00002 申请日期 2014.01.10
申请人 TEC-SEM AG 发明人 ZAUGG, FRANZ
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
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