METHOD AND ARRANGEMENT FOR OPERATING A DYNAMIC NANO FOCUSING SYSTEM

摘要

The invention relates to a method and to an arrangement for operating a dynamic nano focusing system for use thereof in the field of microscopy, interferometry or similar applications, wherein the nano focusing system comprises a lever-transmission piezo actuator and a frictionless guide based on a resiliently deformable solid body joint which is connected to a mounting unit, in particular for a lens, in order to implement the desired adjustment paths for the focusing. According to the invention, in order to increase the dynamics during the focusing process, a secondary fine adjustment movement is superimposed on the primary adjustment movement, said secondary fine adjustment movement having a smaller adjustment path but higher frequency than the primary adjustment movement, wherein, when the fine adjustment is carried out, a determination is made as to whether the focusing result changes, in order to specify according thereto the amount and/or the direction of the primary adjustment movement.

主权项

1. Method for operating a dynamic nanofocusing system for the use thereof in the field of microscopy, interferometry or similar applications, wherein the nanofocusing system comprises a lever-transmitted piezo actuator and a frictionless guide based on an elastically deformable solid-body joint which is connected to a receiving unit, in particular for an objective lens, so as to realize the desired adjusting distances for the focusing,
characterized in that in order to increase the dynamics during the focusing process a secondary fine-adjusting movement with a smaller adjusting distance but a higher frequency is superimposed on the primary adjusting movement, wherein, when the fine adjustment is carried out, it is determined whether the focusing result varies, in order to specify after this the amount and/or the direction of the primary adjusting movement.