| 摘要 |
Provided is a mirror driving device which is capable of eliminating conduction failure due to a short-circuit. A mirror driving device (1A) is provided with a fixed frame, a movable frame (14), a mirror and a permanent magnet (10). The movable frame (14) has a base (100), a drive coil (18), a coating layer (102) and an insulating layer (104). The base (100) comprises a groove portion (100a) that is positioned on a main surface (S4) side and spirally extends. The drive coil (18) is configured from a metal material that is arranged within the groove portion (100a). The coating layer (102) extends over the main surface (S4) so as to cover the opening of the groove portion (100a), and is configured from a metal material that suppresses the diffusion of the metal material that constitutes the drive coil (18). The insulating layer (104) is arranged on the main surface (S4) and the coating layer (102). A lead-out conductor (28b) that is electrically connected to the inner end of the drive coil (18) three-dimensionally intersects with the drive coil (18) with the insulating layer (104) being interposed therebetween. |
