USING RADIAL BASIS FUNCTION NETWORKS AND HYPER-CUBES FOR EXCURSION CLASSIFICATION IN SEMI-CONDUCTOR PROCESSING EQUIPMENT

摘要

A method and system for analysis of data, including creating a first node, determining a first hyper-cube for the first node, determining whether a sample resides within the first hyper-cube. If the sample does not reside within the first hyper-cube, the method includes determining whether the sample resides within a first hyper-sphere, wherein the first hyper-sphere has a radius equal to a diagonal of the first hyper-cube.

主权项

1. A method comprising
creating, by a processor, a first node; determining, by the processor, a first hyper-cube for the first node; determining, by the processor, whether a sample resides within the first hyper-cube; and if the sample does not reside within the first hyper-cube, determining, by the processor, whether the sample resides within a first hyper-sphere, wherein the first hyper-sphere has a radius equal to a diagonal of the first hyper-cube.