Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
申请公布号
WO2014081043(A3)
申请公布日期
2014.07.17
申请号
WO2013JP81827
申请日期
2013.11.20
申请人
NIKON CORPORATION;NIKON METROLOGY NV
发明人
GOODWIN, ERIC PETER;SMITH, DANIEL GENE;COOPER, ALEXANDER;REZK, MINA;SLOTWINSKI, ANTHONY;HEDGES, THOMAS