| 摘要 |
The invention provides a method of aligning optical wafers having formed thereon plural lens elements in determined positions, the method comprising: providing a first wafer having at least two lenses formed thereon in fixed and determined relative positions; providing a second wafer having at least two lenses formed thereon in fixed and determined relative positions; using a first interferometer to align a first wafer by optical interaction between the interferometer and a first of the lenses on the first wafer; using a second interferometer to align a second wafer by optical interaction between the interferometer and a first of the lenses on the second wafer; whereby at least a second of the lenses on each of the first and second wafer are thereby aligned with respect to each other. |
