发明名称 Methods for Forming Semiconductor Devices Using Sacrificial Layers
摘要 A fabricating method for a semiconductor device is provided. The fabricating method includes providing a first wafer, forming a sacrificial layer on the first wafer, forming a release layer on the sacrificial layer, forming an adhesive layer on the release layer, and placing a second wafer on the adhesive layer and bonding the first wafer to the second wafer.
申请公布号 US2014199810(A1) 申请公布日期 2014.07.17
申请号 US201414153545 申请日期 2014.01.13
申请人 Samsung Electronics Co., Ltd. 发明人 Park Jin-Ho;Kang Pil-Kyu;Kim Tae-Yeong;Park Byung-Lyul;Park Jum-Yong;Lee Kyu-Ha;Jung Deok-Young;Choi Gil-Heyun
分类号 H01L23/00 主分类号 H01L23/00
代理机构 代理人
主权项 1. A fabricating method for a semiconductor device comprising: providing a first wafer; forming bumps on the first wafer; forming a sacrificial layer on the bumps of the first wafer; forming a release layer on the sacrificial layer; forming an adhesive layer on the release layer; and placing a second wafer on the adhesive layer and bonding the first wafer to the second wafer.
地址 Suwon-si KR