ELECTRO-OPTIC MACH-ZEHNDER MODULATOR AND METHOD FOR FABRICATING AN ELECTRO-OPTIC MACH-ZEHNDER MODULATOR

摘要

An electro-optic Mach-Zehnder modulator includes a first optical waveguide forming a first arm of the Mach-Zehnder modulator, and a second optical waveguide forming a second arm thereof. The first or second optical waveguide includes capacitive segments that are spaced apart from one another, each forming an electrical capacitor. A travelling wave electrode arrangement applies a voltage across the first or second optical waveguide. The travelling wave electrode arrangement includes waveguide electrodes arranged on the capacitive segments , an electrical line extending along a part of the first or second optical waveguide, the electrical line being arranged a distance from the waveguide electrodes, and connecting arrangements, each being assigned to one of the waveguide electrodes. Each connecting arrangement includes at least two connecting structures spaced apart from one another wherein the waveguide electrodes each are electrically connected to the electrical line via the assigned two connecting structures.

主权项

1. An electro-optic Mach-Zehnder modulator, comprising
a first optical waveguide forming a first arm of the Mach-Zehnder modulator; a second optical waveguide forming a second arm of the Mach-Zehnder modulator, wherein the first and/or the second optical waveguide comprises a plurality of capacitive segments spaced apart from one another, the capacitive segments each forming an electrical capacitor; and a travelling wave electrode arrangement for applying a voltage across the first and/or the second optical waveguide, the travelling wave electrode arrangement comprising
a plurality of waveguide electrodes arranged on the capacitive segments;at least one electrical line extending at least partially along a part of the first and/or the second optical waveguide, the electrical line being arranged in a distance from the waveguide electrodes; anda plurality of connecting arrangements, wherein a connecting arrangement is assigned to each of the waveguide electrodes, where-in the connecting arrangements each comprise at least two connecting structures spaced apart from one another wherein the waveguide electrodes each are electrically connected to the electrical line via the assigned two connecting structures.