| 摘要 |
<p>The present invention relates to an angular velocity sensor. An angular velocity sensor (100) according to the present invention comprises a first mass (110a), a second mass (110b), a first frame (120) which is formed on the outside of the first mass (110a) and the second mass (110b), a first connection part (130) which respectively connects the first mass (110a) and the second mass (110b) with the first frame (120) in a Y-axis direction, a second connection part (140) which connects the first mass (110a) and the second mass (110b) with the first frame (120) in a X-axis direction, a second frame (150) which is formed on the outside of the first frame (120), a third connection part (160) which connects the first frame (120) and the second frame (150) in the X-axis direction, and a fourth connection part (170) which connects the first frame (120) and the second frame (150) in the Y-axis direction. The thickness of the first frame in a Z-axis direction is smaller than that of the second frame.</p> |
