| 摘要 |
<p>The invention relates to an irradiation arrangement (1, 3) for irradiating a workpiece (12) with a particle beam (10). The irradiation arrangement (1, 3) comprises a particle beam supply device (2, 9), a workpiece accommodation device (13) and a position-sensitive particle monitoring device (14), characterised in that the position-sensitive particle monitoring device (14) is arranged on the distal side of the workpiece accommodation device (13), when seen from the particle beam supply device (2, 9).</p> |
