| 摘要 |
<p>[Means for Achieving Object] The breaking apparatus has: a table 12 on which a brittle material substrate is placed; a roller head 40 for supporting a freely rotatable roller 32 which makes contact with the substrate and has a vibration actuator 38 for vibrating the roller in the direction in which it is pressed against the substrate; and a moving mechanism 22 for moving the roller head over the surface of the substrate, and a scribe line S is created on a first surface of a brittle material substrate, and a roller is rolled along the scribe line but on a second surface that is on the opposite side from the first surface while pressed against the substrate with the roller being vibrated in the direction in which the roller is pressed against the substrate, and thus the substrate is divided along the scribe line.</p> |
