ETCHING APPARATUS OF SUBSTRATE AND METHOD OF ETCHING USING THE SAME

摘要

A liquid crystal display device comprises a receiving container which receives a substrate and includes a through hole on the bottom thereof, through which etchant is discharged, and four sidewalls for containing the etchant; and a first spray unit which is arranged on the upper side of the receiving container and supplies the etchant to the receiving container. The receiving container further includes an opening and closing driving unit which opens and closes the through hole on the bottom. The first spray unit includes a supply pipe to receive the etchant and a plurality of spray nozzles which are connected to the supply pipe and face the bottom of the receiving container. Therefore, the uniformity and effect of an etching process are improved by etching using a flow rate generated in the receiving container.