| 摘要 |
The present invention relates to an apparatus for separating and enriching fluorinated gas and a method for separating and enriching fluorinated gas using the same and more particularly, to an apparatus for separating and enriching fluorinated gas, including an apparatus for recovering fluorinated gas and an apparatus for separating fluorinated gas, wherein the apparatus for recovering fluorinated gas comprises a gas supply part for supplying mixed gas including fluorinated gas; an adsorption part having one or more fluorinated gas adsorption columns connected in parallel to adsorb fluorinated gas as the mixed gas is injected from the gas supply part; a vacuum pump connected to the adsorption part to recover the adsorbed fluorinated gas; and a storage tank for storing the fluorinated gas recovered by the vacuum pump, and wherein the apparatus for separating fluorinated gas comprises a raw material supply part including the storage tank of the apparatus for recovering fluorinated gas; a separation part including one or more separation modules including an inlet for injecting the mixed gas from the raw material supply part, a separation membrane for separating the fluorinated gas, a transmission hole for discharging non-fluorinated gas separated from the fluorinated gas by the separation membrane, and an outlet for discharging the fluorinated gas separated by the separation membrane so as to separate fluorinated gas from the mixed gas; and a discharge quantity control part connected to the outlet of the separation part and controlling the flow rate of the fluorinated gas being discharged from the separation part. The apparatus for separating and enriching fluorinated gas according to the present invention can separate low-pressure fluorinated gas being discharged as process waste gas without using a pressurizing device more efficiently than an existing pressurizing method. [Reference numerals] (AA) Mass flow controller |
