| 摘要 |
A method for operating a particle beam microscope 92 is disclosed and more specifically wherein the positioning of the sample/sample holder (Fig. 1, 10, 11, 12) is more easily carried out by the operator. At least one of light rays which emanate from a structure (10, 11, 12, 20) and/or particles which emanate from the structure (10, 11, 12, 20) are detected to generate a surface model of the structure. The position and orientation of the surface model of the structure relative to an object region OR can then also be determined. A location P relative to the surface model of the structure is determined and the object is positioned depending on the generated surface model of the structure, the determined position and orientation of the surface model of the structure, and on the determined measurement location P. |
