发明名称 Methods of manufacturing non-volatile phase-change memory devices
摘要 Methods of manufacturing non-volatile memory devices may include separating first phase-change material groups and second phase-change material groups, which have different sizes, from a target including phase-change materials and faulting a phase-change material layer on an object by using the first phase-change material groups and the second phase-change material groups.
申请公布号 US8778728(B2) 申请公布日期 2014.07.15
申请号 US201113160761 申请日期 2011.06.15
申请人 Samsung Electronics Co., Ltd. 发明人 Choi Byoung-deog;Ahn Dong-ho;Kang Man-sug;Kim Young-kuk;Oh Jin-ho
分类号 H01L21/00 主分类号 H01L21/00
代理机构 Harness, Dickey & Pierce, P.L.C. 代理人 Harness, Dickey & Pierce, P.L.C.
主权项 1. A method of manufacturing a non-volatile memory device, the method comprising: separating at least one first phase-change material group and at least one second phase-change material group from a target, a size of the first phase-change material group being different from a size of the second phase-change material group; and forming a phase-change material layer on an object, the phase-change material layer including the first and second phase-change material groups, wherein the first phase-change material group and the second phase-change material group have the same characteristics.
地址 Gyeonggi-Do KR