发明名称 |
Methods of manufacturing non-volatile phase-change memory devices |
摘要 |
Methods of manufacturing non-volatile memory devices may include separating first phase-change material groups and second phase-change material groups, which have different sizes, from a target including phase-change materials and faulting a phase-change material layer on an object by using the first phase-change material groups and the second phase-change material groups. |
申请公布号 |
US8778728(B2) |
申请公布日期 |
2014.07.15 |
申请号 |
US201113160761 |
申请日期 |
2011.06.15 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Choi Byoung-deog;Ahn Dong-ho;Kang Man-sug;Kim Young-kuk;Oh Jin-ho |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
Harness, Dickey & Pierce, P.L.C. |
代理人 |
Harness, Dickey & Pierce, P.L.C. |
主权项 |
1. A method of manufacturing a non-volatile memory device, the method comprising:
separating at least one first phase-change material group and at least one second phase-change material group from a target, a size of the first phase-change material group being different from a size of the second phase-change material group; and forming a phase-change material layer on an object, the phase-change material layer including the first and second phase-change material groups, wherein the first phase-change material group and the second phase-change material group have the same characteristics. |
地址 |
Gyeonggi-Do KR |