Tester and semiconductor device test apparatus having the same

摘要

Provided are a tester and a semiconductor device test apparatus having the tester. The tester includes a tested head configured to transfer electronic signals to a probe card. The tester also includes a leveling unit is provided on the tester head. The leveling unit is configured to apply a load to the probe card to maintain a level state of the probe card.

主权项

1. A tester comprising:
a tester head configured to transfer electric signals to a probe card; and a leveling unit provided on the tester head, the leveling unit configured to maintain a horizontality of the probe card by applying a load to the probe card, the leveling unit including a first supporting plate, a second supporting plate, an elastic member, and a guide member, the first supporting plate above the probe card, the second supporting plate between the probe card and a lower end of the elastic member, the elastic member between the first supporting plate and the probe card, and the guide member in a hole in the first supporting plate, wherein the guide member has a lower end coupled to the second supporting plate and is configured to guide movement of the second supporting plate, and the elastic member is configured to apply a restoring force to the probe card.