| 摘要 |
PURPOSE: A removing device of distortion existed in data values obtained by using a scanning optical microscope and a method thereof are provided to accurately detect the distortion of the data values obtained by a Z scanner, thereby removing the detected distortion. CONSTITUTION: An input unit(510) receives at least one of data values corresponding to the distortion of a sample incline, the data values corresponding to the distortion of the hysteresis characteristic of a Z scanner, and the data values corresponding to the distortion of the creep characteristic of the Z scanner. A distortion removing unit(520) removes at least one of the data values. [Reference numerals] (510) Input unit; (520) Distortion removing unit; (AA) Distortion removing device |
