| 摘要 |
PROBLEM TO BE SOLVED: To accurately perform simple and quick determination, when inspecting the uniformity of light transmittance in a microlens array for scanning exposure.SOLUTION: An inspection device 1 for a microlens array for scanning exposure includes a light source 2 irradiating a microlens array M being an inspection object with light, a light collecting optical system 3 for linearly collecting the light after passing through the whole or a part of the microlens array M along the scanning direction of the scanning exposure, an inspection camera 4 for capturing a linear image light-collected by the light collecting optical system 3, and evaluation means 5 for evaluating the illuminance uniformity of the microlens array M by the image obtained by the inspection camera 4. |
