METHOD AND APPARATUS FOR SURFACE MAPPING USING IN-PLANE GRAZING INCIDENCE DIFFRACTION

摘要

An apparatus for examining the surface of a crystalline sample uses in-plane grazing incidence diffraction with a position-sensitive detector. The x-ray source illuminates an extended region of the sample and, for crystal sections having the appropriate lattice orientation, an elongated diffraction signal is produced. The relative position of the sample and the x-ray beam may then be changed to illuminate different regions of the sample so that the diffraction signal corresponds to these other regions. By scanning across the entire sample, a spatial profile of the sample surface may be generated. The system may be used to locate crystal boundaries, defects, or the presence of attenuating materials on the sample surface.

主权项

1. An apparatus for examining the surface of a crystalline sample using in-plane grazing incidence diffraction, the apparatus comprising:
an x-ray source that generates an x-ray beam that is incident on the sample at an angle relative to the sample surface that results in the generation of an in-plane grazing incidence x-ray diffraction signal from sections of the sample having a crystal structure in a specific orientation, the beam simultaneously illuminating a sample region that extends substantially the entire length of the sample in a first direction; a position sensitive x-ray detector that receives the x-ray diffraction signal, the diffraction signal having a spatial profile that corresponds to the illuminated region of the sample; and a displacement mechanism for changing the relative position of the x-ray beam and the sample so as to change the region of the sample that is illuminated thereby.