Sample Block Holder

摘要

A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.

主权项

1. A sample holder system for a charged particle beam system having a sample chamber with a sample stage, comprising:
a stage mount for being affixed to the stage of a charged particle beam system, the stage mount including three alignment structures; a base plate including three alignment structures, each alignment structure on the base plate structured to mate with a corresponding alignment structure on the stage mount, one of each mating alignment structures on the base plate or on stage mount including a hemispherical portion; a sample tray configured to be removably attachable onto the base plate, the sample tray having multiple holes for positioning sample blocks; a clamp holding the sample tray to the base plate; and a calibration standard holder secured to the stage mount and remaining on the stage mount as samples are changed in the charged particle beam system.